DSpace at KOASAS: A Study on the Formation and Solid Phase Epitaxial Regrowth of Amorphized Layer by Silicon Implantation

DSpace at KOASAS

College of Engineering(공과대학)Dept. of Materials Science and Engineering(신소재공학과)MS-Conference Papers(학술회의논문)

A Study on the Formation and Solid Phase Epitaxial Regrowth of Amorphized Layer by Silicon Implantation

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Lee, Jeong Yong researcher

Publisher: Advanced materials and processing

Issue Date: 1995-06

Language: English

Citation: Second Pacific Rim International Conference on Advanced Materials and Processing, pp.1315 - 0

URI: http://hdl.handle.net/10203/119911

Appears in Collection: MS-Conference Papers(학술회의논문)

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Knowledge Service Development Team, KAIST 291 Daehak-ro, Yuseong-gu, Daejeon 34141, Republic of Korea. T. 82-42-350-4493 Email. koasas@kaist.ac.kr
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