DC Field | Value | Language |
---|---|---|
dc.contributor.author | 백동현 | - |
dc.contributor.author | 윤완철 | - |
dc.contributor.author | 박상찬 | - |
dc.date.accessioned | 2013-03-15T13:27:05Z | - |
dc.date.available | 2013-03-15T13:27:05Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 1996-10 | - |
dc.identifier.citation | 대한산업공학회, v., no., pp.23 - 26 | - |
dc.identifier.uri | http://hdl.handle.net/10203/119858 | - |
dc.language | KOR | - |
dc.publisher | 대한산업공학회 | - |
dc.title | 웨이퍼 가공 공정의 신뢰성있는 생산통제를 위한 공간적응절차 | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.citation.beginningpage | 23 | - |
dc.citation.endingpage | 26 | - |
dc.citation.publicationname | 대한산업공학회 | - |
dc.identifier.conferencecountry | South Korea | - |
dc.identifier.conferencecountry | South Korea | - |
dc.contributor.localauthor | 윤완철 | - |
dc.contributor.nonIdAuthor | 백동현 | - |
dc.contributor.nonIdAuthor | 박상찬 | - |
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