Fault-Tolerant Supervisory Control of Rapid Thermal Processors
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Cho, Kwang-Hyun | - |
| dc.date.accessioned | 2013-03-15T12:53:43Z | - |
| dc.date.available | 2013-03-15T12:53:43Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1998 | - |
| dc.identifier.citation | 1998 Workshop on Control, Automation and Robotics, v., no., pp.357 - 360 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/119631 | - |
| dc.language | KOR | - |
| dc.publisher | ICASE | - |
| dc.title | Fault-Tolerant Supervisory Control of Rapid Thermal Processors | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 357 | - |
| dc.citation.endingpage | 360 | - |
| dc.citation.publicationname | 1998 Workshop on Control, Automation and Robotics | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | Cho, Kwang-Hyun | - |
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