A PED-stabilized Chemically Amplified Resist
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Kim, Jin-Baek | - |
| dc.contributor.author | Choi, Jae-Hak | - |
| dc.contributor.author | Jung, Min Ho | - |
| dc.contributor.author | Kim, Hyun-Woo | - |
| dc.date.accessioned | 2013-03-15T12:48:56Z | - |
| dc.date.available | 2013-03-15T12:48:56Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1997-10-11 | - |
| dc.identifier.citation | 한국고분자학회 1997년도 추계 학술대회 , v., no., pp.329 - 330 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/119590 | - |
| dc.language | ENG | - |
| dc.publisher | 한국고분자학회 | - |
| dc.title | A PED-stabilized Chemically Amplified Resist | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 329 | - |
| dc.citation.endingpage | 330 | - |
| dc.citation.publicationname | 한국고분자학회 1997년도 추계 학술대회 | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | Kim, Jin-Baek | - |
| dc.contributor.nonIdAuthor | Choi, Jae-Hak | - |
| dc.contributor.nonIdAuthor | Jung, Min Ho | - |
| dc.contributor.nonIdAuthor | Kim, Hyun-Woo | - |
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