Design and Batch-fabrication of Piezoresistive Cantilever Microaccelerometers with Symmetrically Bonded Proof-mass
- Issue Date
- 1997
- Language
- ENG
- Citation
Proc. International MEMS Workshop (iMEMS '97), pp.6 - 9
- Appears in Collection
- BiS-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.