Investigation of the gate oxide integrity of the nitrided gate oxide using nitrogen implantation into polysilicon gateInvestigation of the gate oxide integrity of the nitrided gate oxide using nitrogen implantation into polysilicon gate
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Cho, Byung Jin | - |
| dc.contributor.author | Ko, LH | - |
| dc.contributor.author | Nga, YA | - |
| dc.contributor.author | Chan, LH | - |
| dc.date.accessioned | 2013-03-15T12:30:58Z | - |
| dc.date.available | 2013-03-15T12:30:58Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1998-11-30 | - |
| dc.identifier.citation | Abstract Proc. of the Asia-Pacific SIA'98 Conf., v., no., pp.0 - 0 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/119480 | - |
| dc.language | ENG | - |
| dc.title | Investigation of the gate oxide integrity of the nitrided gate oxide using nitrogen implantation into polysilicon gate | - |
| dc.title.alternative | Investigation of the gate oxide integrity of the nitrided gate oxide using nitrogen implantation into polysilicon gate | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 0 | - |
| dc.citation.endingpage | 0 | - |
| dc.citation.publicationname | Abstract Proc. of the Asia-Pacific SIA'98 Conf. | - |
| dc.identifier.conferencecountry | Singapore | - |
| dc.identifier.conferencecountry | Singapore | - |
| dc.contributor.localauthor | Cho, Byung Jin | - |
| dc.contributor.nonIdAuthor | Ko, LH | - |
| dc.contributor.nonIdAuthor | Nga, YA | - |
| dc.contributor.nonIdAuthor | Chan, LH | - |
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