Development of a Combined Optical and X-ray Interferometer (COXI) system for nanometrology
- Issue Date
- 1998-07-22
- Language
- ENG
- Citation
Laser Interferometry IX: Applications, v.3479, pp.94 - 101
- Appears in Collection
- RIMS Conference Papers
- Files in This Item
- There are no files associated with this item.
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