DC Field | Value | Language |
---|---|---|
dc.contributor.author | Cho, Byung Jin | - |
dc.contributor.author | Joo, MS | - |
dc.contributor.author | Lee, SH | - |
dc.contributor.author | Lee, SK | - |
dc.contributor.author | KIm, JC | - |
dc.contributor.author | Choi, SH | - |
dc.date.accessioned | 2013-03-15T12:24:24Z | - |
dc.date.available | 2013-03-15T12:24:24Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 1995-06-07 | - |
dc.identifier.citation | Symp. on VLSI Tech., v., no., pp.107 - 107 | - |
dc.identifier.uri | http://hdl.handle.net/10203/119439 | - |
dc.language | ENG | - |
dc.title | Novel oxynitridation technology for highly reliable thin dielectrics | - |
dc.title.alternative | Novel oxynitridation technology for highly reliable thin dielectrics | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.citation.beginningpage | 107 | - |
dc.citation.endingpage | 107 | - |
dc.citation.publicationname | Symp. on VLSI Tech. | - |
dc.identifier.conferencecountry | Japan | - |
dc.identifier.conferencecountry | Japan | - |
dc.contributor.localauthor | Cho, Byung Jin | - |
dc.contributor.nonIdAuthor | Joo, MS | - |
dc.contributor.nonIdAuthor | Lee, SH | - |
dc.contributor.nonIdAuthor | Lee, SK | - |
dc.contributor.nonIdAuthor | KIm, JC | - |
dc.contributor.nonIdAuthor | Choi, SH | - |
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