DC Field | Value | Language |
---|---|---|
dc.contributor.author | Lee, Won-Jong | ko |
dc.contributor.author | Chun, Soung Soon | ko |
dc.contributor.author | Kim, Il | ko |
dc.date.accessioned | 2013-03-15T11:54:33Z | - |
dc.date.available | 2013-03-15T11:54:33Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 1994-12 | - |
dc.identifier.citation | Proceedings of the IUMRS (International Union of Materials Research Society) 1994 International conference on Electronic Materials (ICEM'94), pp.321 - 326 | - |
dc.identifier.uri | http://hdl.handle.net/10203/119246 | - |
dc.language | English | - |
dc.publisher | ICEM | - |
dc.title | Dielectrric characteristics of ECR-PECVD TA2O5 thin films on various substrates | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.citation.beginningpage | 321 | - |
dc.citation.endingpage | 326 | - |
dc.citation.publicationname | Proceedings of the IUMRS (International Union of Materials Research Society) 1994 International conference on Electronic Materials (ICEM'94) | - |
dc.identifier.conferencecountry | CH | - |
dc.identifier.conferencelocation | Hsinchu | - |
dc.contributor.localauthor | Lee, Won-Jong | - |
dc.contributor.localauthor | Chun, Soung Soon | - |
dc.contributor.nonIdAuthor | Kim, Il | - |
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