Influence of hydrogen addition on the chemical properties of hydrogenated aluminum nitride films prepared by rf reactive sputtering
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Lee, Jai Young | - |
| dc.contributor.author | Yong Y.-J. | - |
| dc.date.accessioned | 2013-03-15T10:58:41Z | - |
| dc.date.available | 2013-03-15T10:58:41Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1996-12-02 | - |
| dc.identifier.citation | Proceedings of the 1996 MRS Fall Symposium, v.449, no., pp.999 - 1004 | - |
| dc.identifier.issn | 0272-9172 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/118832 | - |
| dc.language | ENG | - |
| dc.title | Influence of hydrogen addition on the chemical properties of hydrogenated aluminum nitride films prepared by rf reactive sputtering | - |
| dc.type | Conference | - |
| dc.identifier.scopusid | 2-s2.0-0030713470 | - |
| dc.type.rims | CONF | - |
| dc.citation.volume | 449 | - |
| dc.citation.beginningpage | 999 | - |
| dc.citation.endingpage | 1004 | - |
| dc.citation.publicationname | Proceedings of the 1996 MRS Fall Symposium | - |
| dc.identifier.conferencecountry | United States | - |
| dc.identifier.conferencecountry | United States | - |
| dc.contributor.localauthor | Lee, Jai Young | - |
| dc.contributor.nonIdAuthor | Yong Y.-J. | - |
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