Design and fabrication of piezoresistive cantilever microaccelerometer arrays with a symmetrically bonded proof-mass
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Ko Jong Soo | - |
| dc.contributor.author | Cho, Young-Ho | - |
| dc.contributor.author | Kwak Byung Man | - |
| dc.contributor.author | Park Kwanhum | - |
| dc.date.accessioned | 2013-03-15T10:25:02Z | - |
| dc.date.available | 2013-03-15T10:25:02Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1998-11-15 | - |
| dc.identifier.citation | Inter. Mechanical Engineering Congress and Exposition(IMECE '98), ASME, v.66, no., pp.353 - 356 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/118631 | - |
| dc.language | ENG | - |
| dc.title | Design and fabrication of piezoresistive cantilever microaccelerometer arrays with a symmetrically bonded proof-mass | - |
| dc.type | Conference | - |
| dc.identifier.scopusid | 2-s2.0-0032294206 | - |
| dc.type.rims | CONF | - |
| dc.citation.volume | 66 | - |
| dc.citation.beginningpage | 353 | - |
| dc.citation.endingpage | 356 | - |
| dc.citation.publicationname | Inter. Mechanical Engineering Congress and Exposition(IMECE '98), ASME | - |
| dc.identifier.conferencecountry | United States | - |
| dc.identifier.conferencecountry | United States | - |
| dc.contributor.localauthor | Cho, Young-Ho | - |
| dc.contributor.nonIdAuthor | Ko Jong Soo | - |
| dc.contributor.nonIdAuthor | Kwak Byung Man | - |
| dc.contributor.nonIdAuthor | Park Kwanhum | - |
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