DSpace at KOASAS: Preparation and characterization of SrTiO3 thin films using ECR plasma assisted MOCVD

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College of Engineering(공과대학)Dept. of Materials Science and Engineering(신소재공학과)MS-Conference Papers(학술회의논문)

Preparation and characterization of SrTiO3 thin films using ECR plasma assisted MOCVD

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Lee, Joon Sung / Song, Han Wook / Yoon, Dae Sung / Jun, Byung Hyuk / Yu, Byoung Gon / Lee, Won-Jong researcher / Lee, Won-Jong researcher / No, Kwangsoo researcher

Publisher: MRS

Issue Date: 1995-11-27

Language: English

Citation: Proceedings of the 1995 MRS Fall Meeting, pp.183 - 188

ISSN: 0272-9172

URI: http://hdl.handle.net/10203/118509

Appears in Collection: MS-Conference Papers(학술회의논문)

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