Frequency tuning of a laterally driven microresonator using an electrostatic comb array of linearly varied length
- Issue Date
- 1997-06-16
- Language
- ENG
- Citation
Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 1 (of 2), v.1, pp.113 - 116
- Appears in Collection
- BiS-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
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