DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kim, Sung-Tae | - |
dc.contributor.author | Kim, Hyun-Ho | - |
dc.contributor.author | Lee, Moon-Yong | - |
dc.contributor.author | Lee, Won-Jong | - |
dc.date.accessioned | 2013-03-15T09:03:36Z | - |
dc.date.available | 2013-03-15T09:03:36Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 1996-12-02 | - |
dc.identifier.citation | Proceedings of the 1996 MRS Fall Meeting, v.441, no., pp.205 - 210 | - |
dc.identifier.issn | 0272-9172 | - |
dc.identifier.uri | http://hdl.handle.net/10203/118083 | - |
dc.language | ENG | - |
dc.title | Preparation of PZT thin films on Pt/Ti/SiO2 and Pt/SiO2 substrates by ECR plasma enhanced DC magnetron multi-target reactive sputtering | - |
dc.type | Conference | - |
dc.identifier.scopusid | 2-s2.0-0030721362 | - |
dc.type.rims | CONF | - |
dc.citation.volume | 441 | - |
dc.citation.beginningpage | 205 | - |
dc.citation.endingpage | 210 | - |
dc.citation.publicationname | Proceedings of the 1996 MRS Fall Meeting | - |
dc.identifier.conferencecountry | United States | - |
dc.identifier.conferencecountry | United States | - |
dc.contributor.localauthor | Lee, Won-Jong | - |
dc.contributor.nonIdAuthor | Kim, Sung-Tae | - |
dc.contributor.nonIdAuthor | Kim, Hyun-Ho | - |
dc.contributor.nonIdAuthor | Lee, Moon-Yong | - |
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