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College of Engineering(공과대학)Dept. of Materials Science and Engineering(신소재공학과)MS-Conference Papers(학술회의논문)

A Study on the Deposition Mechnaism of SrTiO3 films Grown by ECRMOCVD

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dc.contributor.authorNo, Kwangsoo-
dc.contributor.authorLee, Joon Sung-
dc.contributor.authorSong, Han Wook-
dc.contributor.authorZun, Byung Hyuk-
dc.contributor.authorJiang, Zhang-Tao-
dc.contributor.authorShort, Robert-
dc.contributor.authorJohnston, Peter-
dc.contributor.authorYu, Byung Gon-
dc.date.accessioned2013-03-15T08:37:15Z-
dc.date.available2013-03-15T08:37:15Z-
dc.date.created2012-02-06-
dc.date.issued1996-01-01-
dc.identifier.citationISPSA, v., no., pp. --
dc.identifier.urihttp://hdl.handle.net/10203/117919-
dc.languageENG-
dc.publisherISPSA-
dc.titleA Study on the Deposition Mechnaism of SrTiO3 films Grown by ECRMOCVD-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.publicationnameISPSA-
dc.contributor.localauthorNo, Kwangsoo-
dc.contributor.nonIdAuthorLee, Joon Sung-
dc.contributor.nonIdAuthorSong, Han Wook-
dc.contributor.nonIdAuthorZun, Byung Hyuk-
dc.contributor.nonIdAuthorJiang, Zhang-Tao-
dc.contributor.nonIdAuthorShort, Robert-
dc.contributor.nonIdAuthorJohnston, Peter-
dc.contributor.nonIdAuthorYu, Byung Gon-
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MS-Conference Papers(학술회의논문)
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