DSpace at KOASAS: 회로모델을 통한 ICP 방전의 전자가열 이론

DSpace at KOASAS

College of Natural Sciences(자연과학대학)Dept. of Physics(물리학과)PH-Conference Papers(학술회의논문)

회로모델을 통한 ICP 방전의 전자가열 이론

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Issue Date: 1996

Language: KOR

Citation: 한국진공학회 제11회 학술발표회

URI: http://hdl.handle.net/10203/117024

Appears in Collection: PH-Conference Papers(학술회의논문)

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회로모델을 통한 ICP 방전의 전자가열 이론

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