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College of Engineering(공과대학)Dept. of Bio and Brain Engineering(바이오및뇌공학과)BiS-Conference Papers(학술회의논문)

High-density silicon microprobe arrays for LCD pixel inspection

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Lee, Changyeol / Kim, Yoonhyuk / Choi, Yong-Gie / Cho, Young-Horesearcher / Lee, Kwyro / Kwak, Byung Man
Issue Date
1996-02-11
Language
ENG
Citation

Proceedings of the 1995 9th Annual International Workshop on Micro Electro Mechanical Systems, pp.429 - 434

URI
http://hdl.handle.net/10203/116851
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BiS-Conference Papers(학술회의논문)
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