Low-temperature crystallization of amorphous silicon thin films by microwave heating

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dc.contributor.authorLee, Jeong Noko
dc.contributor.authorKim, Yoon Changko
dc.contributor.authorChoi, Yong Wooko
dc.contributor.authorAhn, Byung Taeko
dc.date.accessioned2013-03-15T03:43:05Z-
dc.date.available2013-03-15T03:43:05Z-
dc.date.created2012-02-06-
dc.date.created2012-02-06-
dc.date.issued1997-03-31-
dc.identifier.citationProceedings of the 1997 MRS Spring Meeting, pp.173 - 178-
dc.identifier.issn0272-9172-
dc.identifier.urihttp://hdl.handle.net/10203/116123-
dc.languageEnglish-
dc.publisherMRS-
dc.titleLow-temperature crystallization of amorphous silicon thin films by microwave heating-
dc.typeConference-
dc.identifier.wosidA1997BJ69K00026-
dc.identifier.scopusid2-s2.0-0030681644-
dc.type.rimsCONF-
dc.citation.beginningpage173-
dc.citation.endingpage178-
dc.citation.publicationnameProceedings of the 1997 MRS Spring Meeting-
dc.identifier.conferencecountryUS-
dc.identifier.conferencelocationSan Francisco, CA, USA-
dc.contributor.localauthorAhn, Byung Tae-
dc.contributor.nonIdAuthorLee, Jeong No-
dc.contributor.nonIdAuthorKim, Yoon Chang-
dc.contributor.nonIdAuthorChoi, Yong Woo-
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MS-Conference Papers(학술회의논문)
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