DC Field | Value | Language |
---|---|---|
dc.contributor.author | 한철희 | - |
dc.date.accessioned | 2013-03-15T02:29:27Z | - |
dc.date.available | 2013-03-15T02:29:27Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 1997 | - |
dc.identifier.citation | 대한전기학회 학술대회, v., no., pp.9 - | - |
dc.identifier.uri | http://hdl.handle.net/10203/115753 | - |
dc.language | KOR | - |
dc.title | 자외선조사를 이용한 구리의 유도결합 플라즈마식각 | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.citation.beginningpage | 9 | - |
dc.citation.publicationname | 대한전기학회 학술대회 | - |
dc.identifier.conferencecountry | South Korea | - |
dc.identifier.conferencecountry | South Korea | - |
dc.contributor.localauthor | 한철희 | - |
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