건식현상형 레지스트에 관한 연구
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 김진백 | - |
| dc.contributor.author | 김현우 | - |
| dc.contributor.author | 권영길 | - |
| dc.date.accessioned | 2013-03-15T01:52:13Z | - |
| dc.date.available | 2013-03-15T01:52:13Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1997-07-03 | - |
| dc.identifier.citation | ISRC 연구결과 요약집, v., no., pp.625 - 626 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/115584 | - |
| dc.language | KOR | - |
| dc.title | 건식현상형 레지스트에 관한 연구 | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 625 | - |
| dc.citation.endingpage | 626 | - |
| dc.citation.publicationname | ISRC 연구결과 요약집 | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | 김진백 | - |
| dc.contributor.nonIdAuthor | 김현우 | - |
| dc.contributor.nonIdAuthor | 권영길 | - |
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- CH-Conference Papers(학술회의논문)
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