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College of Engineering(공과대학)Dept. of Materials Science and Engineering(신소재공학과)MS-Conference Papers(학술회의논문)

ECR PECVD 법으로 제조한 TiN박막의 비저항, 피복성 및 확산장벽특성에 관한 연구

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Issue Date
1996-01-01
Language
KOR
Citation

한국재료학회 1996 추계학술연구발표회, pp.0 - 0

URI
http://hdl.handle.net/10203/115468
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MS-Conference Papers(학술회의논문)
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