DSpace at KOASAS: Effect of CO ans CO2 addition to CF4/O2 gas system on the etch rate and selectivity of W

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College of Engineering(공과대학)Dept. of Chemical and Biomolecular Engineering(생명화학공학과)CBE-Conference Papers(학술회의논문)

Effect of CO ans CO2 addition to CF4/O2 gas system on the etch rate and selectivity of W

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Kwon, SK / Nam, CW / Chung, IJ / Woo, Seong-Ihl researcher

Issue Date: 1991

Language: ENG

Citation: Conference on Semiconductors Materials, Component & CAD, pp.161 -

URI: http://hdl.handle.net/10203/114119

Appears in Collection: CBE-Conference Papers(학술회의논문)

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Effect of CO ans CO2 addition to CF4/O2 gas system on the etch rate and selectivity of W

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