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College of Engineering(공과대학)Dept. of Materials Science and Engineering(신소재공학과)MS-Conference Papers(학술회의논문)

Preparation of PZT thin films by ECR PECVD

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dc.contributor.authorKim, JW-
dc.contributor.authorKim, ST-
dc.contributor.authorChung, SW-
dc.contributor.authorShin, JS-
dc.contributor.authorNo, Kwangsoo-
dc.contributor.authorWee, Dang-Moon-
dc.contributor.authorLee, Won-Jong-
dc.date.accessioned2013-03-14T22:33:43Z-
dc.date.available2013-03-14T22:33:43Z-
dc.date.created2012-02-06-
dc.date.issued1994-04-04-
dc.identifier.citationProceedings of the 1994 MRS Spring Meeting, v.343, no., pp.493 - 498-
dc.identifier.issn0272-9172-
dc.identifier.urihttp://hdl.handle.net/10203/114062-
dc.languageENG-
dc.publisherMRS-
dc.titlePreparation of PZT thin films by ECR PECVD-
dc.typeConference-
dc.identifier.scopusid2-s2.0-0028583003-
dc.type.rimsCONF-
dc.citation.volume343-
dc.citation.beginningpage493-
dc.citation.endingpage498-
dc.citation.publicationnameProceedings of the 1994 MRS Spring Meeting-
dc.identifier.conferencecountryUnited States-
dc.identifier.conferencecountryUnited States-
dc.contributor.localauthorNo, Kwangsoo-
dc.contributor.localauthorWee, Dang-Moon-
dc.contributor.localauthorLee, Won-Jong-
dc.contributor.nonIdAuthorKim, JW-
dc.contributor.nonIdAuthorKim, ST-
dc.contributor.nonIdAuthorChung, SW-
dc.contributor.nonIdAuthorShin, JS-
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MS-Conference Papers(학술회의논문)
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