DC Field | Value | Language |
---|---|---|
dc.contributor.author | Moon, DW | ko |
dc.contributor.author | Kim, HK | ko |
dc.contributor.author | Kim, YP | ko |
dc.contributor.author | Ha, YH | ko |
dc.contributor.author | Choi, Si-Kyung | ko |
dc.contributor.author | Kim, Sehun | ko |
dc.date.accessioned | 2009-09-21T06:06:38Z | - |
dc.date.available | 2009-09-21T06:06:38Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 1997-04 | - |
dc.identifier.citation | NUCLEAR INSTRUMENTS METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, v.125, no.1-4, pp.120 - 123 | - |
dc.identifier.issn | 0168-583X | - |
dc.identifier.uri | http://hdl.handle.net/10203/11377 | - |
dc.description.abstract | To optimize the depth resolution of Medium Energy Ion Scattering Spectroscopy (MEIS), a 10 nm Ta2O5 thin film on a Si(100) substrate was analyzed by MEIS using H+ and heavy ions such as Li+, N+ and Ne+ ions. The use of heavy ions such as Li+ and N+ increased the electronic stopping powers 2-3 times but it also increased the electronic straggling compared to H+ ions, For Nef ions, the ion neutralization problem was so severe that the scattering ion intensity from the subsurface layer was attenuated very rapidly and a strong doubly ionized Ne++ peak was observed. For 100 keV N+ and Ne+ ions, multiple scattering peaks were observed. | - |
dc.description.sponsorship | The work is supported financially from the center for molecular science, south korea. | en |
dc.language | English | - |
dc.language.iso | en_US | en |
dc.publisher | ELSEVIER SCIENCE BV | - |
dc.subject | CRYSTALS | - |
dc.subject | PROTONS | - |
dc.title | The electronic energy loss of 100 keV heavy ions in medium energy ion scattering analysis of a Ta2O5 ultrathin film | - |
dc.type | Article | - |
dc.identifier.wosid | A1997WX88000023 | - |
dc.identifier.scopusid | 2-s2.0-0031550966 | - |
dc.type.rims | ART | - |
dc.citation.volume | 125 | - |
dc.citation.issue | 1-4 | - |
dc.citation.beginningpage | 120 | - |
dc.citation.endingpage | 123 | - |
dc.citation.publicationname | NUCLEAR INSTRUMENTS METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | - |
dc.embargo.liftdate | 9999-12-31 | - |
dc.embargo.terms | 9999-12-31 | - |
dc.contributor.localauthor | Choi, Si-Kyung | - |
dc.contributor.localauthor | Kim, Sehun | - |
dc.contributor.nonIdAuthor | Moon, DW | - |
dc.contributor.nonIdAuthor | Kim, HK | - |
dc.contributor.nonIdAuthor | Kim, YP | - |
dc.contributor.nonIdAuthor | Ha, YH | - |
dc.type.journalArticle | Article; Proceedings Paper | - |
dc.subject.keywordPlus | CRYSTALS | - |
dc.subject.keywordPlus | PROTONS | - |
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