DSpace at KOASAS: 상위 게이트(Top gate) 다결정 실리콘 박막 트렌지스터의 수소화 기구

DSpace at KOASAS

College of Engineering(공과대학)School of Electrical Engineering(전기및전자공학부)EE-Conference Papers(학술회의논문)

상위 게이트(Top gate) 다결정 실리콘 박막 트렌지스터의 수소화 기구

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Issue Date: 1994

Language: KOR

Citation: 한국반도체학술대회, pp.431 - 432

URI: http://hdl.handle.net/10203/112998

Appears in Collection: EE-Conference Papers(학술회의논문)

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상위 게이트(Top gate) 다결정 실리콘 박막 트렌지스터의 수소화 기구

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