Preparation and Characterization of SOG thin film for interdielectric layer and planarization
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Nam, CW | - |
| dc.contributor.author | Woo, Seong-Ihl | - |
| dc.date.accessioned | 2013-03-14T20:33:53Z | - |
| dc.date.available | 2013-03-14T20:33:53Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1993 | - |
| dc.identifier.citation | 3rd Industry/Academy Cooperation Research Seminar, Electronic Ceramics Research Center, v., no., pp.119 - 225 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/112996 | - |
| dc.language | ENG | - |
| dc.title | Preparation and Characterization of SOG thin film for interdielectric layer and planarization | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 119 | - |
| dc.citation.endingpage | 225 | - |
| dc.citation.publicationname | 3rd Industry/Academy Cooperation Research Seminar, Electronic Ceramics Research Center | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | Woo, Seong-Ihl | - |
| dc.contributor.nonIdAuthor | Nam, CW | - |
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