Modelling and Simulation Study on CVD for SiC film

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dc.contributor.authorKo, JH-
dc.contributor.authorWoo, Seong-Ihl-
dc.date.accessioned2013-03-14T20:01:59Z-
dc.date.available2013-03-14T20:01:59Z-
dc.date.created2012-02-06-
dc.date.issued1988-
dc.identifier.citationConference on Semiconductors, Materials, Components and CAD, v., no., pp.112 --
dc.identifier.urihttp://hdl.handle.net/10203/112706-
dc.languageENG-
dc.titleModelling and Simulation Study on CVD for SiC film-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.beginningpage112-
dc.citation.publicationnameConference on Semiconductors, Materials, Components and CAD-
dc.identifier.conferencecountrySouth Korea-
dc.identifier.conferencecountrySouth Korea-
dc.contributor.localauthorWoo, Seong-Ihl-
dc.contributor.nonIdAuthorKo, JH-
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CBE-Conference Papers(학술회의논문)
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