SOI NMOSFET에서 Edge효과 감소를 위한 LOCOS공정
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 김충기 | - |
| dc.date.accessioned | 2013-03-14T16:50:58Z | - |
| dc.date.available | 2013-03-14T16:50:58Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1994 | - |
| dc.identifier.citation | 한국반도체학술대회, v., no., pp.209 - 210 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/110945 | - |
| dc.language | KOR | - |
| dc.title | SOI NMOSFET에서 Edge효과 감소를 위한 LOCOS공정 | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 209 | - |
| dc.citation.endingpage | 210 | - |
| dc.citation.publicationname | 한국반도체학술대회 | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | 김충기 | - |
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- EE-Conference Papers(학술회의논문)
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