The Effect of Reaction Condition on the Crystallographic Orientation and Surface Morphology of Chemical Vapor Deposited Al2O3
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Chun , Soung Soon | ko |
| dc.date.accessioned | 2013-03-14T16:11:47Z | - |
| dc.date.available | 2013-03-14T16:11:47Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1983-05 | - |
| dc.identifier.citation | Proc. EURO CVD 4, Chemical Vapor Deposition , pp.410 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/110609 | - |
| dc.language | English | - |
| dc.publisher | European Conference on Chemical Vapour Deposition | - |
| dc.title | The Effect of Reaction Condition on the Crystallographic Orientation and Surface Morphology of Chemical Vapor Deposited Al2O3 | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 410 | - |
| dc.citation.publicationname | Proc. EURO CVD 4, Chemical Vapor Deposition | - |
| dc.identifier.conferencecountry | NE | - |
| dc.identifier.conferencelocation | Eindhoven | - |
| dc.contributor.localauthor | Chun , Soung Soon | - |
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