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4-MIRROR IMAGING-SYSTEM (MAGNIFICATION +1-5) FOR ARF EXCIMER-LASER LITHOGRAPHY RIM, CS; CHO, YM; Kong, Hong-Jin; LEE, SS, OPTICAL AND QUANTUM ELECTRONICS, v.27, no.5, pp.319 - 325, 1995-05 |
IMPROVED 4-MIRROR OPTICAL-SYSTEM FOR DEEP-ULTRAVIOLET SUBMICROMETER LITHOGRAPHY KIM, JT; Kong, Hong-Jin; LEE, SS, OPTICAL ENGINEERING, v.32, no.3, pp.536 - 541, 1993-03 |
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