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Showing results 6 to 9 of 9

6
Numerical study of the plasma wall-bias effect on the ion flux through acceleration grid hole

Park, Seung-Hoon; Chang, Choong-Seock, PHYSICS OF PLASMAS, v.17, no.7, pp.073505, 2010-07

7
On the possibility of the multiple inductively coupled plasma and helicon plasma sources for large-area processes

Lee, Jinwon; Lee, Yun-Seong; Chang, Hong-Young; An, Sang-Hyuk, PHYSICS OF PLASMAS, v.21, no.8, 2014-08

8
Research of non-uniformity in 450 mm multi-electrode capacitive coupled plasma

Park, Gi Jung; Lee, Yoon Seong; Seo, Sang Hoon; Chung, Chin Wook; Chang, Hong-Young, THIN SOLID FILMS, v.547, pp.293 - 298, 2013-11

9
Study on SiN and SiCN film production using PE-ALD process with high-density multi-ICP source at low temperature

Song, Hohyun; Seo, Sang Hun; Chang, Hongyoung, CURRENT APPLIED PHYSICS, v.18, no.11, pp.1436 - 1440, 2018-11

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