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Temporal evolution of electron energy distribution function and plasma parameters in the afterglow of drifting magnetron plasma Seo, SH; In, JH; Chang, Hong-Young, PLASMA SOURCES SCIENCE & TECHNOLOGY, v.14, pp.576 - 580, 2005-08 |
Time evolution of electron energy distribution function and plasma parameters in pulsed and unbalanced magnetron argon discharge Seo, SH; In, JH; Chang, Hong-Young; Han, JG, JOURNAL OF APPLIED PHYSICS, v.98, pp.8471 - 8477, 2005-08 |
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