Showing results 2 to 5 of 5
Experimental investigations of pulse-power-modulated inductive discharges Seo, SH; Chang, Hong-Young; Yang, WC; Kwon, JH; Kim, DH; Kim, YY; Nam, JH; et al, JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v.48, pp.414 - 421, 2006-03 |
Review of heating mechanism in inductively coupled plasma Seo, SH; Chung, CW; Chang, Hong-Young, SURFACE COATINGS TECHNOLOGY, v.131, no.1-3, pp.1 - 11, 2000-09 |
Study on electron heating and E-H mode transition in planar inductively coupled plasma = 평판형 유도결합 플라즈마에서 전자 가열 및 E-H 모드 전이에 관한 연구link Seo, Sang-Hun; 서상훈; et al, 한국과학기술원, 2000 |
그리드전압을 이용한 전자온도제어 및 $CF_4/Ar$ 플라즈마에의 응용에 관한 연구 = Study on controlling electron temperature with grid bias and Its application to $CF_4/Ar$ plasmalink 홍정인; Hong, Jung-In; et al, 한국과학기술원, 1999 |
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