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Effect of mixing CF4 with O-2 on electron characteristics of capacitively coupled plasma Seol, Youbin; Chang, Hong Young; Ahn, Seung Kyu; You, Shin Jae, PHYSICS OF PLASMAS, v.30, no.1, 2023-01 |
Study on characteristics of electron parameters on inert gas addition in a capacitively coupled SF6/O-2 plasma![]() Seol, Youbin; Chang, Hong Young; Ahn, Seung Kyu; You, Shin Jae, AIP ADVANCES, v.12, no.12, 2022-12 |
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