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Acid diffusion control in chemically amplified resists Kim, Jin-Baek; Choi, JH; Kwon, YG; Jung, MH; Chang, KH, POLYMER, v.40, no.4, pp.1087 - 1089, 1999-02 |
Poly(isobornyl methacrylate-co-3-(t-butoxycarbonyl)-1-vinyl-2-caprolactam) for an environmentally stable chemically amplified resist Kim, Jin-Baek; Choi, JH; Kim, H; Kwon, YG; Jung, MH, POLYMER JOURNAL, v.31, no.9, pp.695 - 699, 1999 |
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