Browse "College of Natural Sciences(자연과학대학)" by Subject 이중 주파수 플라즈마파형
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| 이중 주파수 축전 결합 플라즈마에 관한 연구 = A study on dual frequency capacitively coupled plasma(DFCCP)link 안승규; Ahn, Seung-Kyu; et al, 한국과학기술원, 2004 |
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