CVD-Cu 박막의 특성에 증착온도가 미치는 영향
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 박종욱 | ko |
| dc.contributor.author | 천성순 | ko |
| dc.date.accessioned | 2013-03-14T11:55:19Z | - |
| dc.date.available | 2013-03-14T11:55:19Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1994-11 | - |
| dc.identifier.citation | 한국재료학회 추계학술발표 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/108412 | - |
| dc.language | Korean | - |
| dc.publisher | 한국재료학회 | - |
| dc.title | CVD-Cu 박막의 특성에 증착온도가 미치는 영향 | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | 한국재료학회 추계학술발표 | - |
| dc.identifier.conferencecountry | KO | - |
| dc.identifier.conferencelocation | 서울대 | - |
| dc.contributor.localauthor | 박종욱 | - |
| dc.contributor.localauthor | 천성순 | - |
- Appears in Collection
- RIMS Conference PapersMS-Conference Papers(학술회의논문)RIMS Conference Papers
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