Experimental results of a prototype rapid thermal annealing systemExperimental results of a prototype rapid thermal annealing system
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 조병진 | - |
| dc.contributor.author | Kim, KT | - |
| dc.contributor.author | Kim, CK | - |
| dc.date.accessioned | 2013-03-14T11:54:34Z | - |
| dc.date.available | 2013-03-14T11:54:34Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1986-05-14 | - |
| dc.identifier.citation | Conf. on CAD, Semiconductor Material and Components, v., no., pp.71 - 71 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/108406 | - |
| dc.language | KOR | - |
| dc.title | Experimental results of a prototype rapid thermal annealing system | - |
| dc.title.alternative | Experimental results of a prototype rapid thermal annealing system | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 71 | - |
| dc.citation.endingpage | 71 | - |
| dc.citation.publicationname | Conf. on CAD, Semiconductor Material and Components | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | 조병진 | - |
| dc.contributor.nonIdAuthor | Kim, KT | - |
| dc.contributor.nonIdAuthor | Kim, CK | - |
- Appears in Collection
- EE-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.