Resist Process Technology
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Kim, Jin-Baek | - |
| dc.date.accessioned | 2013-03-14T10:09:27Z | - |
| dc.date.available | 2013-03-14T10:09:27Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1989 | - |
| dc.identifier.citation | Technical Proceedings, SEMICON/Korea, v., no., pp.74 - 83 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/107668 | - |
| dc.language | ENG | - |
| dc.title | Resist Process Technology | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 74 | - |
| dc.citation.endingpage | 83 | - |
| dc.citation.publicationname | Technical Proceedings, SEMICON/Korea | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | Kim, Jin-Baek | - |
- Appears in Collection
- CH-Conference Papers(학술회의논문)
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