PECVD방법으로 증착된 알루미늄 산화박막의 조성 및 구조분석
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 이원종 | ko |
| dc.contributor.author | 천성순 | ko |
| dc.contributor.author | 김용천 | ko |
| dc.date.accessioned | 2013-03-14T08:14:09Z | - |
| dc.date.available | 2013-03-14T08:14:09Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1992-11 | - |
| dc.identifier.citation | 한국재료학회 추계학술연구발표회, pp.0 - 0 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/106893 | - |
| dc.language | Korean | - |
| dc.publisher | 한국재료학회 | - |
| dc.title | PECVD방법으로 증착된 알루미늄 산화박막의 조성 및 구조분석 | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 0 | - |
| dc.citation.endingpage | 0 | - |
| dc.citation.publicationname | 한국재료학회 추계학술연구발표회 | - |
| dc.identifier.conferencecountry | KO | - |
| dc.identifier.conferencelocation | 서울 KOEX | - |
| dc.contributor.localauthor | 이원종 | - |
| dc.contributor.localauthor | 천성순 | - |
| dc.contributor.nonIdAuthor | 김용천 | - |
- Appears in Collection
- MS-Conference Papers(학술회의논문)RIMS Conference Papers
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.