규소기판집합에 있어서의 기공발생
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 강상원 | - |
| dc.contributor.author | 안근영 | - |
| dc.contributor.author | 정귀상 | - |
| dc.contributor.author | 윤선진 | - |
| dc.date.accessioned | 2013-03-14T04:05:02Z | - |
| dc.date.available | 2013-03-14T04:05:02Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1992 | - |
| dc.identifier.citation | 한국센서학회 92센서기술학술대회 논문집, v., no., pp. - | - |
| dc.identifier.uri | http://hdl.handle.net/10203/105075 | - |
| dc.language | KOR | - |
| dc.title | 규소기판집합에 있어서의 기공발생 | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | 한국센서학회 92센서기술학술대회 논문집 | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | 강상원 | - |
| dc.contributor.nonIdAuthor | 안근영 | - |
| dc.contributor.nonIdAuthor | 정귀상 | - |
| dc.contributor.nonIdAuthor | 윤선진 | - |
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- MS-Conference Papers(학술회의논문)
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