DC Field | Value | Language |
---|---|---|
dc.contributor.author | Chang, Shih-wei | ko |
dc.contributor.author | Oh, Jihun | ko |
dc.contributor.author | Boles, Steven T. | ko |
dc.contributor.author | Thompson, Carl V. | ko |
dc.date.accessioned | 2013-03-12T21:52:41Z | - |
dc.date.available | 2013-03-12T21:52:41Z | - |
dc.date.created | 2013-02-21 | - |
dc.date.created | 2013-02-21 | - |
dc.date.issued | 2010-04 | - |
dc.identifier.citation | APPLIED PHYSICS LETTERS, v.96, no.15 | - |
dc.identifier.issn | 0003-6951 | - |
dc.identifier.uri | http://hdl.handle.net/10203/103631 | - |
dc.description.abstract | We report the fabrication of silicon nanopillar-based nanocapacitor arrays using metal-assisted etching in conjunction with electrodeposition. The high aspect ratio made possible by the catalyzed etching provides for an increased effective electrode area and hence a significant improvement in the capacitance density. Electroplated Ni electrode forms a conformal layer over the silicon nanopillars. Capacitance measurements show the expected trend as a function of pillar height and array period. The fabrication approach is simple, compatible with integration into standard silicon technology, and easily scalable. | - |
dc.language | English | - |
dc.publisher | AMER INST PHYSICS | - |
dc.subject | NANOWIRES | - |
dc.subject | LITHOGRAPHY | - |
dc.subject | PERFORMANCE | - |
dc.subject | CELLS | - |
dc.title | Fabrication of silicon nanopillar-based nanocapacitor arrays | - |
dc.type | Article | - |
dc.identifier.wosid | 000276794100063 | - |
dc.identifier.scopusid | 2-s2.0-77951600307 | - |
dc.type.rims | ART | - |
dc.citation.volume | 96 | - |
dc.citation.issue | 15 | - |
dc.citation.publicationname | APPLIED PHYSICS LETTERS | - |
dc.identifier.doi | 10.1063/1.3374889 | - |
dc.contributor.localauthor | Oh, Jihun | - |
dc.contributor.nonIdAuthor | Chang, Shih-wei | - |
dc.contributor.nonIdAuthor | Boles, Steven T. | - |
dc.contributor.nonIdAuthor | Thompson, Carl V. | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordAuthor | capacitors | - |
dc.subject.keywordAuthor | electrodeposition | - |
dc.subject.keywordAuthor | etching | - |
dc.subject.keywordAuthor | nanoelectronics | - |
dc.subject.keywordAuthor | nanofabrication | - |
dc.subject.keywordAuthor | nickel | - |
dc.subject.keywordAuthor | silicon | - |
dc.subject.keywordPlus | NANOWIRES | - |
dc.subject.keywordPlus | LITHOGRAPHY | - |
dc.subject.keywordPlus | PERFORMANCE | - |
dc.subject.keywordPlus | CELLS | - |
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