DC Field | Value | Language |
---|---|---|
dc.contributor.author | Abdelsalam, D. G. | ko |
dc.contributor.author | Baek, Byung Joon | ko |
dc.contributor.author | Abdel-Aziz, F. | ko |
dc.contributor.author | Chegal, Won | ko |
dc.contributor.author | Kim, Daesuk | ko |
dc.date.accessioned | 2013-03-12T19:37:13Z | - |
dc.date.available | 2013-03-12T19:37:13Z | - |
dc.date.created | 2012-10-09 | - |
dc.date.created | 2012-10-09 | - |
dc.date.issued | 2012 | - |
dc.identifier.citation | OPTIK, v.123, no.16, pp.1444 - 1449 | - |
dc.identifier.issn | 0030-4026 | - |
dc.identifier.uri | http://hdl.handle.net/10203/103308 | - |
dc.description.abstract | This paper describes an automated multiple-beam interferometry for measuring a calibrated step height of (27.00 +/- 3.00) nm nominally. The fringes captured from the multiple-beam Fizeau-Tolansky interferometer were thinned by using a written program to obtain accurate measurement. We claim that multiple-beam interferometry based on automatic fringe thinning process can provide a real time solution for calibrating step heights precisely and with high accuracy. The uncertainty budget of the multiple-beam interferometry method due to incomplete parallelism of the incident beam and the inhomogeneity of the reflecting layers was calculated automatically with a written ray tracing program. The uncertainty budget in multiple-beam interferometry was estimated to be of the order of 3.00 nm. (c) 2011 Elsevier GmbH. All rights reserved. | - |
dc.language | English | - |
dc.publisher | ELSEVIER GMBH, URBAN & FISCHER VERLAG | - |
dc.subject | INTERFERENCE-FRINGES | - |
dc.subject | SPECTROSCOPIC ELLIPSOMETRY | - |
dc.title | Highly accurate film thickness measurement based on automatic fringe analysis | - |
dc.type | Article | - |
dc.identifier.wosid | 000308381100009 | - |
dc.identifier.scopusid | 2-s2.0-84863621897 | - |
dc.type.rims | ART | - |
dc.citation.volume | 123 | - |
dc.citation.issue | 16 | - |
dc.citation.beginningpage | 1444 | - |
dc.citation.endingpage | 1449 | - |
dc.citation.publicationname | OPTIK | - |
dc.identifier.doi | 10.1016/j.ijleo.2011.07.065 | - |
dc.contributor.nonIdAuthor | Abdelsalam, D. G. | - |
dc.contributor.nonIdAuthor | Baek, Byung Joon | - |
dc.contributor.nonIdAuthor | Abdel-Aziz, F. | - |
dc.contributor.nonIdAuthor | Kim, Daesuk | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordAuthor | Multiple-beam interferometry | - |
dc.subject.keywordAuthor | Step height | - |
dc.subject.keywordAuthor | Fringe analysis | - |
dc.subject.keywordAuthor | Ray tracing | - |
dc.subject.keywordPlus | INTERFERENCE-FRINGES | - |
dc.subject.keywordPlus | SPECTROSCOPIC ELLIPSOMETRY | - |
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