Development of a compact and long range XY theta(z) nano-positioning stage

Abstract

In this study, we describe the development of a novel, compact, and long range in-plane XY theta(z) nano-positioning stage with piezoelectric actuator and flexure mechanism. The stage is composed of an X-directional motion part and a Y, theta(z)-directional motion part, which are linked serially. The stage consists of a bridge-type amplifying mechanism for the amplification of deformation of the piezoelectric actuator, a double compound guide mechanism for performing only desired motion, and a circular hinge mechanism that permits rotational motion in the Y and theta(z)-stages. To set the design variables of the stage, optimal design is carried out. To verify the results of the optimal design process and the performance of the stage, the FEM simulation and experiment are carried out. The proposed XY theta(z) nano-positioning stage has a translational motion range of 700 mu m and a rotational motion range of 0.3 degrees; it has a closed-loop resolution of 5 nm, 5 nm, and 0.025 arcsec in the X-, Y-, and theta(z)-directional motions, respectively. The proposed stage is a novelty in that it has a compact size of 200 x 200 x 30 mm(3), and decoupled kinematic design. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4740254]