DC Field | Value | Language |
---|---|---|
dc.contributor.author | Park, Jung-Ho | ko |
dc.contributor.author | Lee, Hu-Seung | ko |
dc.contributor.author | Lee, Jae-Hoon | ko |
dc.contributor.author | Yun, So-Nam | ko |
dc.contributor.author | Ham, Young-Bog | ko |
dc.contributor.author | Yun, Dong-Won | ko |
dc.date.accessioned | 2013-03-12T08:38:06Z | - |
dc.date.available | 2013-03-12T08:38:06Z | - |
dc.date.created | 2012-12-10 | - |
dc.date.created | 2012-12-10 | - |
dc.date.issued | 2012-09 | - |
dc.identifier.citation | JAPANESE JOURNAL OF APPLIED PHYSICS, v.51, no.9 | - |
dc.identifier.issn | 0021-4922 | - |
dc.identifier.uri | http://hdl.handle.net/10203/101807 | - |
dc.description.abstract | Recently, laser scanners have been used for laser processing such as cutting, welding, and grooving, especially in the automotive industry. The laser scanners need a high-speed driving to minimize cracks caused by thermal shock of brittle materials. Therefore, a novel laser processing system that is composed of a laser source and a piezoelectric-driven tilt mirror to control the reflection angle of the laser beam, and a stage equipped with the tilt mirror has been investigated. In this study, a piezoelectric-driven tilt mirror is designed and analyzed for scanning performance to achieve a beam spot of 30 mu m, a pattern width of 1 mm, an overlap ratio of 70% of the circle area, and a scanning speed of 1 m/s. Then, structural analysis of the tilt mirror with three piezoelectric actuators is performed to determine the maximum reflection angle and resonance frequency. Finally, a prototype tilt mirror is fabricated and its basic characteristics are experimentally investigated and discussed. (C) 2012 The Japan Society of Applied Physics | - |
dc.language | English | - |
dc.publisher | JAPAN SOC APPLIED PHYSICS | - |
dc.subject | ND-YAG LASER | - |
dc.subject | FABRICATION | - |
dc.subject | SILICON | - |
dc.subject | SYSTEM | - |
dc.title | Design of a Piezoelectric-Driven Tilt Mirror for a Fast Laser Scanner | - |
dc.type | Article | - |
dc.identifier.wosid | 000310702900024 | - |
dc.identifier.scopusid | 2-s2.0-84867727596 | - |
dc.type.rims | ART | - |
dc.citation.volume | 51 | - |
dc.citation.issue | 9 | - |
dc.citation.publicationname | JAPANESE JOURNAL OF APPLIED PHYSICS | - |
dc.identifier.doi | 10.1143/JJAP.51.09MD14 | - |
dc.contributor.nonIdAuthor | Park, Jung-Ho | - |
dc.contributor.nonIdAuthor | Lee, Jae-Hoon | - |
dc.contributor.nonIdAuthor | Yun, So-Nam | - |
dc.contributor.nonIdAuthor | Ham, Young-Bog | - |
dc.contributor.nonIdAuthor | Yun, Dong-Won | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordPlus | ND-YAG LASER | - |
dc.subject.keywordPlus | FABRICATION | - |
dc.subject.keywordPlus | SILICON | - |
dc.subject.keywordPlus | SYSTEM | - |
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