Transformable Functional Nanoscale Building Blocks with Wafer-Scale Silicon Nanowires

Abstract

Through the fusion of electrostatics. and mechanical dynamics, we demonstrate a transformable silicon nanowire, (SiNW) field effect transistor (FET) through a Wafer-scale top-down approach. By felicitously taking advantage of the proposed electrostatic SiNW-FET with mechanically movable SiNWs, all essential logic gates, including address decoders, can be monolithically integrated into a single device. The unification of various functional devices, such as pn-diodes, FETs, logic gates, and address decoders, can therefore eliminate the complex fabrication issues associated with nanoscale integration. These results represent a step toward the creation of multifunctional and flexible nanoelectronics.