Active Autofocus Control Using Source Dithering Technique Based on Fibre-optic Confocal Principle

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A significant process for highly precise measurement in 2-D inspection and 3D surface metrology is accurate and consistent imaging of target being measured. Dithering locking method, one of widely-used focus-locking method, has been only applied to objective modulation type which cause physical influence and image distortion. To overcome this, we have developed an actively locked focus-tracking system based around source dithering technique using fiber-optic confocal principle. Further, the whole measurement system can be simplified through both fiber confocal microscope design with reciprocity and fiber source modulation. It is verified that the proposed focus-tracking system has sub-pm focusing stability and accuracy. By testing focus tracking performance on a LCD panel substrate with a few pm-sized features, the applicability to optical profiler with vision inspection was confirmed.
Publisher
KOREAN SOC PRECISION ENG
Issue Date
2011-08
Language
English
Article Type
Article
Citation

INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING, v.12, no.4, pp.733 - 736

ISSN
2234-7593
URI
http://hdl.handle.net/10203/100463
Appears in Collection
ME-Journal Papers(저널논문)
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