A self-consistent global model of solenoidal-type inductively coupled plasma discharges including the effects of radio-frequency bias power

Abstract

We developed a self-consistent global simulator of solenoidal-type inductively coupled plasma discharges and observed the effect of the radio-frequency (rf) bias power on the plasma density and the electron temperature. We numerically solved a set of spatially averaged fluid equations for charged particles, neutrals, and radicals. Absorbed power by electrons is determined by using an analytic electron heating model including the anomalous skin effect. To analyze the effects of rf bias power on the plasma properties, our model also combines the electron heating and global transport modules with an rf sheath module in a self-consistent manner. The simulation results are compared with numerical results by using the commercial software package CFD-ACE+ (ESI group) and experimental measurements by using a wave cutoff probe and a single Langmuir probe. (C) 2011 American Institute of Physics. [doi:10.1063/1.3572264]