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Additive Soft-Lithographic Patterning of Submicrometer- and Nanometer-Scale Large-Area Resists on Electronic Materials Ahn, Heejoon; Lee, Keonjae; Shim, Anne; Rogers, John A; Nuzzo, Ralph G., NANO LETTERS, v.5, no.12, pp.2533 - 2537, 2005-10 |
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