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Dual Servo Stage Without Mechanical Coupling for Process of Manufacture and Inspection of Flat Panel Displays Via Modular Design Approach Kim, Kihyun; Cho, Young-Man; Nam, Byoung-Uk; Lee, Moon Gu, INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING, v.13, no.3, pp.407 - 412, 2012-03 |
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